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Datasheet
Piezoresistive silicon pressure sensors
Microbridge Mass Airflow/Amplified
Compensated or uncompensated. ±25.0 SCCM, 1.0 SLPM, 6.0 SLPM. Analog output
High Flow Mass Airflow/Amplified
Compensated. 200 SLPM, ±300 SLPM. Analog output
Humidity Temperature Sensor 0 ~ 100% RH Analog Voltage ±3.5% RH 5 s Through Hole
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